发明授权
- 专利标题: Semiconductor device and method of manufacturing semiconductor device
- 专利标题(中): 半导体装置及其制造方法
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申请号: US13038349申请日: 2011-03-01
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公开(公告)号: US08604584B2公开(公告)日: 2013-12-10
- 发明人: Hiroki Wakimoto , Kenichi Iguchi , Koh Yoshikawa , Tsunehiro Nakajima , Shunsuke Tanaka , Masaaki Ogino
- 申请人: Hiroki Wakimoto , Kenichi Iguchi , Koh Yoshikawa , Tsunehiro Nakajima , Shunsuke Tanaka , Masaaki Ogino
- 申请人地址: JP Kawasaki-Shi
- 专利权人: Fuji Electric Co., Ltd.
- 当前专利权人: Fuji Electric Co., Ltd.
- 当前专利权人地址: JP Kawasaki-Shi
- 代理机构: Rabin & Berdo, P.C.
- 优先权: JP2010-045740 20100302
- 主分类号: H01L21/78
- IPC分类号: H01L21/78 ; H01L21/302
摘要:
Some embodiments of the present invention relate to a semiconductor device and a method of manufacturing a semiconductor device capable of preventing the deterioration of electrical characteristics. A p-type collector region is provided on a surface layer of a backside surface of an n-type drift region. A p+-type isolation layer for obtaining reverse blocking capability is provided at the end of an element. In addition, a concave portion is provided so as to extend from the backside surface of the n-type drift region to the p+-type isolation layer. A p-type region is provided and is electrically connected to the p+-type isolation layer. The p+-type isolation layer is provided so as to include a cleavage plane having the boundary between the bottom and the side wall of the concave portion as one side.
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