发明授权
- 专利标题: Electronic device package structure with a hydrophilic protection layer and method for fabricating the same
- 专利标题(中): 具有亲水保护层的电子器件封装结构及其制造方法
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申请号: US12891734申请日: 2010-09-27
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公开(公告)号: US08598686B2公开(公告)日: 2013-12-03
- 发明人: Tao-Chih Chang , Su-Tsai Lu , Jing-Yao Chang , Chau-Jie Zhan
- 申请人: Tao-Chih Chang , Su-Tsai Lu , Jing-Yao Chang , Chau-Jie Zhan
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 优先权: TW99107774A 20100317
- 主分类号: H01L23/544
- IPC分类号: H01L23/544
摘要:
The invention provides an electronic device package structure and method of fabrication thereof. The electronic device package structure includes a chip having an active surface and a bottom surface. A dielectric layer is disposed on the active surface of the chip. At least one trench is formed through the dielectric layer. A first protection layer covers the dielectric layer and sidewalls of the trench. A second protection layer covers the first protection layer, filling the trench.
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