发明授权
- 专利标题： Method and apparatus for adjusting radiation spot size
- 专利标题（中）： 调整辐射光斑尺寸的方法和装置
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申请号： US13336992申请日： 2011-12-23
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公开(公告)号： US08598488B2公开(公告)日： 2013-12-03
- 发明人: Ciaran John Patrick O'Connor , Shane Hilliard , Leif Summerfield
- 申请人： Ciaran John Patrick O'Connor , Shane Hilliard , Leif Summerfield
- 申请人地址： US OR Portland
- 专利权人： Electro Scientific Industries, Inc.
- 当前专利权人： Electro Scientific Industries, Inc.
- 当前专利权人地址： US OR Portland
- 主分类号： B23K26/38
- IPC分类号： B23K26/38
摘要：
An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.
公开/授权文献
- US20130161510A1 METHOD AND APPARATUS FOR ADJUSTING RADIATION SPOT SIZE 公开/授权日：2013-06-27
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