发明授权
US08594507B2 Method and apparatus for measuring gas concentrations 有权
测量气体浓度的方法和装置

Method and apparatus for measuring gas concentrations
摘要:
Some embodiments are directed to a photoacoustic sensor. The photoacoustic sensor may comprise: a gas cell with an opening; a light source to generate to radiate a sample gas within the gas cell; an optical microphone to detect the sample gas within the gas cell; and a membrane aligned with the opening of the gas cell to permit sample gas to enter the gas cell. The optical microphone includes a semiconducting laser. The semiconducting laser includes a p-n junction within a cavity of the semiconducting laser. The optical microphone further includes a pressure-sensitive membrane that receives coherent light emitted from the semiconducting laser and directs reflected light back toward the semiconducting laser. During operation of the optical microphone, the pressure-sensitive membrane flexes in response to acoustic pressure waves. The phase of the reflected light is dependent upon a distance of the pressure-sensitive membrane from an aperture of the semiconducting laser.
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