发明授权
- 专利标题: Methods of forming semiconductor constructions
- 专利标题(中): 形成半导体结构的方法
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申请号: US13480677申请日: 2012-05-25
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公开(公告)号: US08551844B1公开(公告)日: 2013-10-08
- 发明人: Zengtao T. Liu
- 申请人: Zengtao T. Liu
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Some embodiments include methods in which first insulative material is formed across a memory region and a peripheral region of a substrate. An etch stop structure is formed to have a higher portion over the memory region than over the peripheral region. A second insulative material is formed to protect the lower portion of the etch stop structure, and the higher portion is removed. Subsequently, at least some of the first and second insulative materials are removed. Some embodiments include semiconductor constructions having a first region with first features, and a second region with second features. The first features are closer spaced than the second features. A first insulative material is over the second region and an insulative structure is over the first insulative material. The structure has a stem joined to a bench. The bench has an upper surface, and the stem extends to above the upper surface.
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