Invention Grant
US08541855B2 Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
有权
Co / Ni多层膜,具有改进的磁性器件应用的面外各向异性
- Patent Title: Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications
- Patent Title (中): Co / Ni多层膜,具有改进的磁性器件应用的面外各向异性
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Application No.: US13068398Application Date: 2011-05-10
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Publication No.: US08541855B2Publication Date: 2013-09-24
- Inventor: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- Applicant: Guenole Jan , Witold Kula , Ru Ying Tong , Yu Jen Wang
- Applicant Address: US CA Milpitas
- Assignee: MagIC Technologies, Inc.
- Current Assignee: MagIC Technologies, Inc.
- Current Assignee Address: US CA Milpitas
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L43/00 ; H01L23/552 ; H01L29/34 ; H01L29/74 ; H01L31/111

Abstract:
A MTJ for a spintronic device is disclosed and includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a reference layer, dipole layer, or free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.
Public/Granted literature
- US20120286382A1 Co/Ni multilayers with improved out-of-plane anisotropy for magnetic device applications Public/Granted day:2012-11-15
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