Invention Grant
- Patent Title: Protective treatment for porous materials
- Patent Title (中): 多孔材料的保护处理
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Application No.: US13675442Application Date: 2012-11-13
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Publication No.: US08540890B2Publication Date: 2013-09-24
- Inventor: Mikhail Baklanov , Francesca Iacopi , Serge Vanhaelemeersch
- Applicant: IMEC , GLOBALFOUNDRIES Inc.
- Applicant Address: BE Leuven KY Grand Cayman
- Assignee: IMEC,GLOBALFOUNDRIES Inc.
- Current Assignee: IMEC,GLOBALFOUNDRIES Inc.
- Current Assignee Address: BE Leuven KY Grand Cayman
- Agency: Knobbe, Martens, Olson & Bear, LLP.
- Priority: EP11189233 20111115
- Main IPC: B31D3/00
- IPC: B31D3/00
![Protective treatment for porous materials](/abs-image/US/2013/09/24/US08540890B2/abs.jpg.150x150.jpg)
Abstract:
A method for treating a surface of a porous material in an environment is provided, comprising setting the temperature of the surface to a value T1 and setting the pressure of the environment to a value P1, contacting the surface with a fluid having a solidifying temperature at the pressure value P1 above the value T1 and having a vaporizing temperature at the pressure value P1 below 80° C., thereby solidifying the fluid in pores of the material, thereby sealing the pores, treating the surface, wherein the treatment is preferably an etching or a modification of the surface, and setting the temperature of the surface to a value T2 and setting the pressure of the environment to a value P2 in such a way as to vaporize the fluid.
Public/Granted literature
- US20130119014A1 PROTECTIVE TREATMENT FOR POROUS MATERIALS Public/Granted day:2013-05-16
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