发明授权
US08536890B2 Semiconductor inspecting device and semiconductor inspecting method 失效
半导体检测装置及半导体检查方法

Semiconductor inspecting device and semiconductor inspecting method
摘要:
A semiconductor inspecting device comprises a probe card for transmitting a signal or power supply to semiconductor wafers having one or more subject chips formed therein, and is constituted such that the first semiconductor wafer faces the first face of the probe card and such that the second semiconductor wafer faces the second face of the probe card on the opposite side of the first face. The probe card includes one or more inspecting chips, which can perform non-contact transmissions with the first subject chip in the first semiconductor wafer and the second subject chip in the second semiconductor wafer.
信息查询
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