发明授权
- 专利标题: Semiconductor inspecting device and semiconductor inspecting method
- 专利标题(中): 半导体检测装置及半导体检查方法
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申请号: US12865201申请日: 2009-02-05
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公开(公告)号: US08536890B2公开(公告)日: 2013-09-17
- 发明人: Yoshio Kameda , Masamoto Tago , Yoshihiro Nakagawa , Koichiro Noguchi
- 申请人: Yoshio Kameda , Masamoto Tago , Yoshihiro Nakagawa , Koichiro Noguchi
- 申请人地址: JP Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008-025445 20080205
- 国际申请: PCT/JP2009/051932 WO 20090205
- 国际公布: WO2009/099122 WO 20090813
- 主分类号: G01R31/20
- IPC分类号: G01R31/20
摘要:
A semiconductor inspecting device comprises a probe card for transmitting a signal or power supply to semiconductor wafers having one or more subject chips formed therein, and is constituted such that the first semiconductor wafer faces the first face of the probe card and such that the second semiconductor wafer faces the second face of the probe card on the opposite side of the first face. The probe card includes one or more inspecting chips, which can perform non-contact transmissions with the first subject chip in the first semiconductor wafer and the second subject chip in the second semiconductor wafer.
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