Invention Grant
US08501393B2 Anti-reflective coating forming composition containing vinyl ether compound
失效
含有乙烯基醚化合物的抗反射涂层成型组合物
- Patent Title: Anti-reflective coating forming composition containing vinyl ether compound
- Patent Title (中): 含有乙烯基醚化合物的抗反射涂层成型组合物
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Application No.: US11596391Application Date: 2005-05-11
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Publication No.: US08501393B2Publication Date: 2013-08-06
- Inventor: Tadashi Hatanaka , Shigeo Kimura , Tomoyuki Enomoto
- Applicant: Tadashi Hatanaka , Shigeo Kimura , Tomoyuki Enomoto
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-144625 20040514; JP2004-353627 20041207
- International Application: PCT/JP2005/008617 WO 20050511
- International Announcement: WO2005/111724 WO 20051124
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/20 ; G03F7/38 ; H01L21/027

Abstract:
There is provided an anti-reflective coating forming composition for use in a lithography of the manufacture of semiconductor devices and for forming an anti-reflective coating that can be developed with an alkaline developer for photoresist, and a method for forming photoresist pattern by use of the anti-reflective coating forming composition. The anti-reflective coating forming composition comprises a compound having at least two vinyl ether groups, an alkali-soluble compound having at least two phenolic hydroxy groups or carboxyl groups, a photoacid generator, and a solvent.
Public/Granted literature
- US20080138744A1 Anti-Reflective Coating Forming Composition Containing Vinyl Ether Compound Public/Granted day:2008-06-12
Information query
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