发明授权
US08499715B2 Coating appratus having two coating devices for successively coating same surface of substrate 失效
具有两个涂覆装置的涂层装置,用于连续地涂覆基材的相同表面

Coating appratus having two coating devices for successively coating same surface of substrate
摘要:
A coating apparatus includes a first coating device, a number of second coating devices and a number of substrate holders. Each of the substrate holders is rotatable relative to the first coating device and the second coating devices such that one of two opposite holding surfaces of the substrate holder alternately faces the first coating device and the second coating devices.
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