发明授权
- 专利标题: Atomic force microscopes and methods of measuring specimens using the same
- 专利标题(中): 原子力显微镜和使用其测量样品的方法
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申请号: US12929674申请日: 2011-02-08
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公开(公告)号: US08499360B2公开(公告)日: 2013-07-30
- 发明人: Yonmook Park
- 申请人: Yonmook Park
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd
- 当前专利权人: Samsung Electronics Co., Ltd
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.LC.
- 优先权: KR10-2010-014020 20100217
- 主分类号: G01Q10/04
- IPC分类号: G01Q10/04
摘要:
Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.
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