Aspects of the invention relate to techniques for generating encrypted profiles for layout features. According to various implementations of the invention, a layout feature is partitioned into subdomains. The subdomains are associated with boundary nodes and internal nodes. Based on layout design and process profile data for the layout feature, a first electric parameter relationship is determined for the boundary nodes and the internal nodes. An encrypted profile for the layout feature is then generated by converting the first electric parameter relationship into a second electric parameter relationship involving the boundary nodes. The encrypted profile may be used for extracting parasitic parameters associated with the layout feature.