发明授权
- 专利标题: Tri wavelength interference modulator and a method for modulation
- 专利标题(中): 三波长干扰调制器和调制方法
-
申请号: US12965009申请日: 2010-12-10
-
公开(公告)号: US08498039B2公开(公告)日: 2013-07-30
- 发明人: Herb He Huang
- 申请人: Herb He Huang
- 申请人地址: CN Shanghai
- 专利权人: Shanghai Lexvu Opto Microelectronics Technology Co., Ltd.
- 当前专利权人: Shanghai Lexvu Opto Microelectronics Technology Co., Ltd.
- 当前专利权人地址: CN Shanghai
- 代理机构: J.C. Patents
- 主分类号: G02B26/00
- IPC分类号: G02B26/00 ; G02B26/08
摘要:
The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.
公开/授权文献
信息查询