发明授权
US08497995B2 Measurement apparatus and method for measuring surface shape and roughness
有权
用于测量表面形状和粗糙度的测量装置和方法
- 专利标题： Measurement apparatus and method for measuring surface shape and roughness
- 专利标题（中）： 用于测量表面形状和粗糙度的测量装置和方法
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申请号： US12669825申请日： 2008-08-14
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公开(公告)号： US08497995B2公开(公告)日： 2013-07-30
- 发明人: Kazuyuki Ota , Hiroshi Yoshikawa , Yusuke Mitarai , Masafumi Takimoto , Kazunori Okudomi , Hiroyuki Shinbata , Kenji Saitoh , Masakazu Matsugu
- 申请人： Kazuyuki Ota , Hiroshi Yoshikawa , Yusuke Mitarai , Masafumi Takimoto , Kazunori Okudomi , Hiroyuki Shinbata , Kenji Saitoh , Masakazu Matsugu
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2007-218382 20070824
- 国际申请： PCT/JP2008/064859 WO 20080814
- 国际公布： WO2009/028377 WO 20090305
- 主分类号： G01B11/24
- IPC分类号： G01B11/24
摘要：
A measurement apparatus includes an illumination light setting unit which sets illumination light having an optical characteristic corresponding to a microstructure which is formed on the surface of a measurement target and is to be measured, and a measurement unit which measures reflected light when the measurement target is irradiated with the illumination light. In addition, an extraction unit extracts, from the measured reflected light, information about the surface shape of the measurement target and the microstructure formed on the surface.
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