发明授权
- 专利标题: Three-dimensional shape measuring apparatus
- 专利标题(中): 三维形状测量仪
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申请号: US12747751申请日: 2008-12-10
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公开(公告)号: US08493570B2公开(公告)日: 2013-07-23
- 发明人: Joon-Ho You , MinGu Kang , Ssang-gun Lim
- 申请人: Joon-Ho You , MinGu Kang , Ssang-gun Lim
- 申请人地址: KR Daejeon
- 专利权人: Intekplus Co., Ltd.
- 当前专利权人: Intekplus Co., Ltd.
- 当前专利权人地址: KR Daejeon
- 代理机构: Kile Park Reed & Houtteman PLLC
- 优先权: KR10-2007-0131393 20071214
- 国际申请: PCT/KR2008/007313 WO 20081210
- 国际公布: WO2009/078616 WO 20090625
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
公开/授权文献
- US20100265517A1 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 公开/授权日:2010-10-21
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