发明授权
- 专利标题: Method for producing a polycrystalline ceramic film on a substrate using a shutter
- 专利标题(中): 使用快门在基板上制造多晶陶瓷膜的方法
-
申请号: US12161517申请日: 2007-01-16
-
公开(公告)号: US08491957B2公开(公告)日: 2013-07-23
- 发明人: Mathias Link , Matthias Schreiter
- 申请人: Mathias Link , Matthias Schreiter
- 申请人地址: DE Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DE Munich
- 代理机构: King & Spalding L.L.P.
- 优先权: DE102006003847 20060126
- 国际申请: PCT/EP2007/050368 WO 20070116
- 国际公布: WO2007/085549 WO 20070802
- 主分类号: H01G7/00
- IPC分类号: H01G7/00
摘要:
In a method for production of a polycrystalline ceramic film on a substrate: a) the substrate is prepared with the substrate surface and preparation of at least one source for the ceramic particles of the ceramic film and b) a particle stream of the ceramic particles is generated from the source of ceramic particles in the direction of the substrate surface on the substrate, with deposition of the ceramic particles on the substrate surface on the substrate with formation of the ceramic film. At least one screen is arranged within the gap, for adjusting an average incidence angle of the ceramic particles relative to a plane normal of the substrate surface, such that the ceramic particles are deposited on the substrate surface at a preferred direction and a relative position of the substrate surface and the screen is altered while the gap remains essentially the same.
公开/授权文献
信息查询