Invention Grant
- Patent Title: Particle-beam microscope
- Patent Title (中): 粒子束显微镜
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Application No.: US12756455Application Date: 2010-04-08
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Publication No.: US08471203B2Publication Date: 2013-06-25
- Inventor: Gerd Benner , Matthias Langer
- Applicant: Gerd Benner , Matthias Langer
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102009016861 20090408
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.
Public/Granted literature
- US20100258719A1 PARTICLE-BEAM MICROSCOPE Public/Granted day:2010-10-14
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