发明授权
- 专利标题： Optical system
- 专利标题（中）： 光学系统
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申请号： US13303296申请日： 2011-11-23
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公开(公告)号： US08456641B1公开(公告)日： 2013-06-04
- 发明人: Vladimir Levinski , Noah Bareket , Michael E. Adel
- 申请人： Vladimir Levinski , Noah Bareket , Michael E. Adel
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Luedeka Neely Group, P.C.
- 代理商 Rick Barnes
- 主分类号： G01N21/55
- IPC分类号： G01N21/55
摘要：
An optical system including a light source, optics for directing illumination, thereby producing reflected light, optics for receiving the reflected light, a splitter disposed at a pupil plane for receiving the reflected light and splitting it into a first and second portion, first imaging optics for receiving the first portion and directing it to a first sensor to produce a first image portion, the first sensor delivering the first image portion to a processor, second imaging optics for receiving the second portion and directing it to a second sensor to produce a second image portion, the second sensor delivering the second image portion to the processor, and the processor for combining the first image portion and the second image portion into a single image of the sample.
信息查询
