发明授权
- 专利标题： Chromatic confocal sensor
- 专利标题（中）： 色共聚焦传感器
-
申请号： US12681926申请日： 2008-10-03
-
公开(公告)号： US08451457B2公开(公告)日： 2013-05-28
- 发明人: Brian J. Gates , Craig R. Sykora , Dean Faklis , Andrew J. Murnan , Nestor O. Farmiga
- 申请人： Brian J. Gates , Craig R. Sykora , Dean Faklis , Andrew J. Murnan , Nestor O. Farmiga
- 申请人地址： US MN Saint Paul
- 专利权人： 3m Innovative Properties Company
- 当前专利权人： 3m Innovative Properties Company
- 当前专利权人地址： US MN Saint Paul
- 代理商 Kristopher L. Storvick
- 国际申请： PCT/US2008/078724 WO 20081003
- 国际公布： WO2009/048808 WO 20090416
- 主分类号： G01B11/14
- IPC分类号： G01B11/14 ; H01L21/027
摘要：
A system comprising a substrate having thereon a multiphoton curable photoreactive composition, a light source that emits a light beam comprising a plurality of wavelengths onto at least one region of the composition on the substrate, and a detector that detects a portion of light reflected from the composition to obtain a location signal with respect to the substrate, wherein the location signal is based at least on a wavelength of the reflected light.
公开/授权文献
- US20100296106A1 CHROMATIC CONFOCAL SENSOR 公开/授权日：2010-11-25
信息查询
