发明授权
- 专利标题： Optical inspection system with polarization isolation of detection system reflections
- 专利标题（中）： 光学检测系统具有偏振隔离检测系统的反射
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申请号： US12971334申请日： 2010-12-17
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公开(公告)号： US08436997B2公开(公告)日： 2013-05-07
- 发明人: Andrei Brunfeld , Gregory Toker , Bryan Clark
- 申请人： Andrei Brunfeld , Gregory Toker , Bryan Clark
- 申请人地址： GB Havant, Hampshire
- 专利权人： Xyratex Technology Limited
- 当前专利权人： Xyratex Technology Limited
- 当前专利权人地址： GB Havant, Hampshire
- 代理机构： Mitch, Harris, Atty at Law, LLC
- 代理商 Andrew M. Harris
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.
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