Invention Grant
- Patent Title: Methods of forming electrically conductive structures
- Patent Title (中): 形成导电结构的方法
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Application No.: US13103050Application Date: 2011-05-07
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Publication No.: US08431184B2Publication Date: 2013-04-30
- Inventor: Nishant Sinha
- Applicant: Nishant Sinha
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: B05D5/12
- IPC: B05D5/12

Abstract:
Some embodiments include methods of forming conductive material within high aspect ratio openings and low aspect ratio openings. Initially, the high aspect ratio openings may be filled with a first conductive material while the low aspect ratio openings are only partially filled with the first conductive material. Additional material may then be selectively plated over the first conductive material within the low aspect ratio openings relative to the first conductive material within the high aspect ratio openings. In some embodiments, the additional material may be activation material that only partially fills the low aspect ratio opening, and another conductive material may be subsequently plated onto the activation material to fill the low aspect ratio openings.
Public/Granted literature
- US20110212260A1 Methods Of Forming Electrically Conductive Structures Public/Granted day:2011-09-01
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