发明授权
- 专利标题： Methods of forming molybdenum sputtering targets
- 专利标题（中）： 形成钼溅射靶的方法
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申请号： US13340973申请日： 2011-12-30
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公开(公告)号： US08425833B2公开(公告)日： 2013-04-23
- 发明人: Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , David G. Schwarz
- 申请人： Brad Lemon , Joseph Hirt , Timothy Welling , James G. Daily, III , David Meendering , Gary Rozak , Jerome O'Grady , Peter R. Jepson , Prabhat Kumar , Steven A. Miller , Richard Wu , David G. Schwarz
- 申请人地址： US MA Newton
- 专利权人： H.C. Starck Inc.
- 当前专利权人： H.C. Starck Inc.
- 当前专利权人地址： US MA Newton
- 代理机构： Bingham McCutchen LLP
- 主分类号： B22F3/12
- IPC分类号： B22F3/12 ; B22F3/24 ; B22F3/20 ; C22C27/04
摘要：
In various embodiments, tubular sputtering targets are produced by forming a tubular billet at least by pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet, and heat treating the worked billet.
公开/授权文献
- US20120189483A1 Methods of forming molybdenum sputtering targets 公开/授权日：2012-07-26
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