Invention Grant
US08404080B2 Apparatus to treat a substrate 有权
用于处理基材的装置

Apparatus to treat a substrate
Abstract:
An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.
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