Invention Grant
- Patent Title: Apparatus to treat a substrate
- Patent Title (中): 用于处理基材的装置
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Application No.: US11417043Application Date: 2006-05-04
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Publication No.: US08404080B2Publication Date: 2013-03-26
- Inventor: Sang-jean Jeon , Jong-rok Park , Sung-yeup Sa , Hee-jeon Yang , Guen-suk Lee
- Applicant: Sang-jean Jeon , Jong-rok Park , Sung-yeup Sa , Hee-jeon Yang , Guen-suk Lee
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Stanzione & Kim, LLP
- Priority: KR10-2005-0066915 20050722
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306

Abstract:
An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.
Public/Granted literature
- US20070017446A1 Apparatus to treat a substrate Public/Granted day:2007-01-25
Information query
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