发明授权
- 专利标题: Solid state imaging device and method for fabricating the same
- 专利标题(中): 固态成像装置及其制造方法
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申请号: US12035340申请日: 2008-02-21
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公开(公告)号: US08354693B2公开(公告)日: 2013-01-15
- 发明人: Mitsuyoshi Mori , Toru Okino , Daisuke Ueda , Toshinobu Matsuno
- 申请人: Mitsuyoshi Mori , Toru Okino , Daisuke Ueda , Toshinobu Matsuno
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2007-151954 20070607
- 主分类号: H01L31/0336
- IPC分类号: H01L31/0336
摘要:
A solid state imaging device includes a pixel having a photoelectric conversion element formed on a semiconductor substrate. The photoelectric conversion element includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of a second conductivity type formed on the first semiconductor layer and forming a junction therebetween; a third semiconductor layer formed on the second semiconductor layer and having a smaller band gap energy than the second semiconductor layer, the third semiconductor layer being made of a single-crystal semiconductor and containing an impurity; and a fourth semiconductor layer of the first conductivity type covering a side surface and an upper surface of the third semiconductor layer. Provision of the fourth semiconductor layer can reduce a current flowing in dark conditions.
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