发明授权
- 专利标题: Flexible semiconductor device and method for manufacturing same
- 专利标题(中): 柔性半导体器件及其制造方法
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申请号: US12681445申请日: 2009-07-30
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公开(公告)号: US08343822B2公开(公告)日: 2013-01-01
- 发明人: Koichi Hirano , Seiichi Nakatani , Tatsuo Ogawa , Takashi Ichiryu , Takeshi Suzuki
- 申请人: Koichi Hirano , Seiichi Nakatani , Tatsuo Ogawa , Takashi Ichiryu , Takeshi Suzuki
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2008-200766 20080804; JP2008-200767 20080804
- 国际申请: PCT/JP2009/003616 WO 20090730
- 国际公布: WO2010/016207 WO 20100211
- 主分类号: H01L21/84
- IPC分类号: H01L21/84 ; H01L21/00
摘要:
A method for manufacturing a flexible semiconductor device includes (i) forming an insulating film on the upper surface of metal foil, (ii) forming an extraction electrode pattern on the upper surface of the metal foil, (iii) forming a semiconductor layer on the insulating film such that the semiconductor layer is in contact with the extraction electrode pattern, (iv) forming a sealing resin layer on the upper surface of the metal foil such that the sealing resin layer covers the semiconductor layer and the extraction electrode pattern, and (v) forming electrodes by etching the metal foil, the metal foil being used as a support for the insulating film, the extraction electrode pattern, the semiconductor layer, and the sealing resin layer formed in (i) to (iv) and used as a constituent material for the electrodes in (v). The metal foil need not be stripped, and a high-temperature process can be used.
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