发明授权
- 专利标题: MEMS deployment flexures
- 专利标题(中): MEMS部署弯曲
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申请号: US12273785申请日: 2008-11-19
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公开(公告)号: US08289614B1公开(公告)日: 2012-10-16
- 发明人: Robert J. Calvet , Roman C. Gutierrez , Xiaolei Liu , Ankur Jain
- 申请人: Robert J. Calvet , Roman C. Gutierrez , Xiaolei Liu , Ankur Jain
- 申请人地址: US CA Arcadia
- 专利权人: DigitalOptics Corporation MEMS
- 当前专利权人: DigitalOptics Corporation MEMS
- 当前专利权人地址: US CA Arcadia
- 代理机构: Haynes and Boone, LLP
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
A flexure assembly can have a stage that is deployed to a desired position by attachment of the flexure assembly to a housing. For example, a frame can be configured to be held in position by one portion of the housing and a deployment pad can be configured to be held in position by another portion of the housing. A deployment flexure can be configured to facilitate positioning of the frame and the deployment pad out-of-plane with respect to one another. The deployment flexure and a motion control flexure can facilitate movement of the stage with respect to the housing. In this manner, the position of the stage and the preload of the stage are determined by the housing.
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