The present invention aims at providing a process for producing a solid catalyst for olefin polymerization, the solid catalyst component being capable of providing a polymer having high stereoregularity when an α-olefin is polymerized; a process for producing a solid catalyst component, which is used for producing the solid catalyst; and a process for producing an olefin polymer using the solid catalyst. This object can be achieved by a process for producing a solid catalyst component (A), the process including a step of bringing a titanium compound (a), a magnesium compound (b) and an internal electron donor represented by Formula (I) into contact with each other: where R1 is a hydrocarbyl group having 1 to 20 carbon atoms; R2, R3, R4, and R5 are each independently selected from a hydrogen atom, a halogen atom and a hydrocarbyl group having 1 to 20 carbon atoms, and at least one selected from R2, R3, R4, and R5 is a hydrocarbyl group having 1 to 20 carbon atoms; and R6 is a halogen atom.