发明授权
US08279903B2 Femtosecond laser processing system with process parameters, controls and feedback
有权
飞秒激光加工系统具有工艺参数，控制和反馈
- 专利标题： Femtosecond laser processing system with process parameters, controls and feedback
- 专利标题（中）： 飞秒激光加工系统具有工艺参数，控制和反馈
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申请号： US13025408申请日： 2011-02-11
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公开(公告)号： US08279903B2公开(公告)日： 2012-10-02
- 发明人: Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
- 申请人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
- 申请人地址： US MI Ann Arbor
- 专利权人： Imra America, Inc.
- 当前专利权人： Imra America, Inc.
- 当前专利权人地址： US MI Ann Arbor
- 代理机构： Sughrue Mion, PLLC
- 主分类号： H01S3/13
- IPC分类号： H01S3/13
摘要：
A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
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