Invention Grant
US08276796B2 Device and method for cutting off substrate of fragile material 失效
用于切断脆性材料的基材的装置和方法

Device and method for cutting off substrate of fragile material
Abstract:
A brittle material substrate cutting method and cutting apparatus are provided, which prevent cut faces of a brittle material substrate from contacting each other after the cutting in a break step of continuously cutting the brittle material substrate, so that a damage or contamination on the brittle material substrate due to the contact can be prevented.
Public/Granted literature
Information query
Patent Agency Ranking
0/0