发明授权
- 专利标题: Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses
- 专利标题(中): 断层原子探针包括高电压电脉冲的电光发生器
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申请号: US13130520申请日: 2009-10-13
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公开(公告)号: US08276210B2公开(公告)日: 2012-09-25
- 发明人: François Vurpillot , Alain Bostel
- 申请人: François Vurpillot , Alain Bostel
- 申请人地址: FR Gennevilliers FR Paris
- 专利权人: Cameca,CNRS
- 当前专利权人: Cameca,CNRS
- 当前专利权人地址: FR Gennevilliers FR Paris
- 代理机构: Baker & Hostetler LLP
- 优先权: FR0806550 20081121
- 国际申请: PCT/EP2009/063346 WO 20091013
- 国际公布: WO2010/057721 WO 20100527
- 主分类号: G01Q60/00
- IPC分类号: G01Q60/00
摘要:
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval Δt0, so that the electrode finally receives a voltage pulse of duration Δt0.
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