发明授权
US08275573B1 Large-surface defect detection by single-frame spatial-carrier interferometry
有权
通过单帧空间载波干涉测量的大面缺陷检测
- 专利标题: Large-surface defect detection by single-frame spatial-carrier interferometry
- 专利标题(中): 通过单帧空间载波干涉测量的大面缺陷检测
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申请号: US12624284申请日: 2009-11-23
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公开(公告)号: US08275573B1公开(公告)日: 2012-09-25
- 发明人: Joanna Schmit , Florin Munteanu
- 申请人: Joanna Schmit , Florin Munteanu
- 申请人地址: US CA Santa Barbara
- 专利权人: Bruker Nano, Inc.
- 当前专利权人: Bruker Nano, Inc.
- 当前专利权人地址: US CA Santa Barbara
- 代理商 Antonio R. Durando
- 主分类号: G04F1/00
- IPC分类号: G04F1/00 ; G01B11/00 ; G01B11/02
摘要:
An adaptive algorithm is tailored to fit the local fringe frequency of single-frame spatial-carrier data under analysis. Each set of data points used sequentially by the algorithm is first processed with a Fourier Transform to find the local frequency of the fringes being analyzed. That information is then used to adapt the algorithm to the correct phase step thus calculated, thereby optimizing the efficiency and precision with which the algorithm profiles the local surface area. As a result, defects are identified and measured with precision even when the slope of the surface varies locally to the point where the algorithm without adaptive modification would not be effective to measure them. Once so identified, the defects may be measured again locally with greater accuracy by conventional temporal PSI.
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