发明授权
- 专利标题: Shape calculation method
- 专利标题(中): 形状计算方法
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申请号: US12630563申请日: 2009-12-03
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公开(公告)号: US08274661B2公开(公告)日: 2012-09-25
- 发明人: Saori Hasegawa
- 申请人: Saori Hasegawa
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2008-311231 20081205
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A method for calculating a shape includes dividing an aspherical test surface into a plurality of measurement regions configured to overlap with one another, receiving, at a light receiving unit, interference fringes which occur due to interference light generated by light reflected on a reference surface serving as a reference for calculating a shape of the test surface and light reflected by each of the measurement regions, and calculating surface shapes of the measurement regions, and calculating a shape of the test surface by joining the calculated surface shapes, wherein the calculation of surface shapes includes adjusting relative positions of the test surface and the reference surface and adjusting a position of the light receiving unit so that the test surface and the light receiving unit have a conjugate relationship with each other in a state in which the position of the test surface is adjusted.
公开/授权文献
- US20100141958A1 SHAPE CALCULATION METHOD 公开/授权日:2010-06-10
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