发明授权
- 专利标题: White light scanning interferometer with simultaneous phase-shifting module
- 专利标题(中): 白光扫描干涉仪同时移相模块
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申请号: US12778009申请日: 2010-05-11
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公开(公告)号: US08269980B1公开(公告)日: 2012-09-18
- 发明人: Piotr Szwaykowski
- 申请人: Piotr Szwaykowski
- 申请人地址: US AZ Tucson
- 专利权人: Engineering Synthesis Design, Inc.
- 当前专利权人: Engineering Synthesis Design, Inc.
- 当前专利权人地址: US AZ Tucson
- 代理机构: Hayes Soloway P.C.
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
A simultaneous phase-shifting white light scanning interferometer comprises a white light scanning interferometer, a simultaneous phase-shifting module, and a scanner. Light from a short coherence length light source may be polarized and then split, by a polarization type beam-splitter, into orthogonally polarized reference and test beams. The simultaneous phase-shifting module comprises a plurality of detectors, allows for controlled phase shifts between the reference and test beams, and creates at least three independent interferograms, each with different phase shifts between the reference and test beams. The scanner translates the simultaneous phase-shifting module with respect to an object under measurement.
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