发明授权
US08269251B2 Method for producing group III nitride semiconductor crystal, group III nitride semiconductor substrate, and semiconductor light-emitting device
有权
III族氮化物半导体晶体,III族氮化物半导体衬底和半导体发光器件的制造方法
- 专利标题: Method for producing group III nitride semiconductor crystal, group III nitride semiconductor substrate, and semiconductor light-emitting device
- 专利标题(中): III族氮化物半导体晶体,III族氮化物半导体衬底和半导体发光器件的制造方法
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申请号: US12600352申请日: 2008-05-16
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公开(公告)号: US08269251B2公开(公告)日: 2012-09-18
- 发明人: Kenji Fujito , Kazumasa Kiyomi
- 申请人: Kenji Fujito , Kazumasa Kiyomi
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Chemical Corporation
- 当前专利权人: Mitsubishi Chemical Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2007-131955 20070517
- 国际申请: PCT/JP2008/059018 WO 20080516
- 国际公布: WO2008/143166 WO 20081127
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
The method for producing a group III nitride semiconductor crystal of the invention comprises a step of preparing a seed crystal having a non-polar plane followed by growing a group III nitride semiconductor from the non-polar plane in a vapor phase, wherein the growing step includes growing the group III nitride semiconductor so as to extend in the +C-axis direction of the seed crystal. A group III-V nitride semiconductor crystal having high quality and a large-area non-polar plane can be obtained by the method.
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