发明授权
- 专利标题: Display device
- 专利标题(中): 显示设备
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申请号: US12959989申请日: 2010-12-03
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公开(公告)号: US08269218B2公开(公告)日: 2012-09-18
- 发明人: Shunpei Yamazaki
- 申请人: Shunpei Yamazaki
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Fish & Richardson P.C.
- 优先权: JP2009-276454 20091204
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/04
摘要:
One object is to provide a transistor including an oxide semiconductor film which is used for the pixel portion of a display device and has high reliability. A display device has a first gate electrode; a first gate insulating film over the first gate electrode; an oxide semiconductor film over the first gate insulating film; a source electrode and a drain electrode over the oxide semiconductor film; a second gate insulating film over the source electrode, the drain electrode and the oxide semiconductor film; a second gate electrode over the second gate insulating film; an organic resin film having flatness over the second gate insulating film; a pixel electrode over the organic resin film having flatness, wherein the concentration of hydrogen atoms contained in the oxide semiconductor film and measured by secondary ion mass spectrometry is less than 1×1016 cm−3.
公开/授权文献
- US20110133181A1 DISPLAY DEVICE 公开/授权日:2011-06-09
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