发明授权
- 专利标题： Laser heated discharge plasma EUV source
- 专利标题（中）： 激光加热放电等离子体EUV源
-
申请号： US12277623申请日： 2008-11-25
-
公开(公告)号： US08269199B2公开(公告)日： 2012-09-18
- 发明人: Malcolm W. McGeoch
- 申请人： Malcolm W. McGeoch
- 申请人地址： US MA Fall River
- 专利权人： Plex LLC
- 当前专利权人： Plex LLC
- 当前专利权人地址： US MA Fall River
- 代理机构： Wolf, Greenfield & Sacks, P.C.
- 主分类号： G21K5/02
- IPC分类号： G21K5/02
摘要：
A self-magnetically confined lithium plasma which also may have an applied axial magnetic field is irradiated at sub-critical density by a carbon dioxide laser to generate extreme ultraviolet photons at the wavelength of 13.5 nm with high efficiency, high power and small source size.
公开/授权文献
- US20090212241A1 LASER HEATED DISCHARGE PLASMA EUV SOURCE 公开/授权日：2009-08-27
信息查询
