发明授权
- 专利标题: Substrate transport apparatus
- 专利标题(中): 基板运输装置
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申请号: US12117355申请日: 2008-05-08
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公开(公告)号: US08267636B2公开(公告)日: 2012-09-18
- 发明人: Christopher Hofmeister , Robert T. Caveney
- 申请人: Christopher Hofmeister , Robert T. Caveney
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号: B25J18/00
- IPC分类号: B25J18/00
摘要:
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
公开/授权文献
- US20080298944A1 SUBSTRATE TRANSPORT APPARATUS 公开/授权日:2008-12-04
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