发明授权
US08243397B2 Micromachined electrothermal rotary actuator 有权
微加工电热旋转执行器

Micromachined electrothermal rotary actuator
摘要:
The present disclosure is directed to a micromachined rotary actuator constructed of a central portion and an outer portion at least partially surrounding the central portion and separated from the central portion by an in-plane gap. A plurality of arms are each connected at one end to the central portion and at another end to the outer portion so as to span the in-plane gap. The arms are constructed of a plurality of horizontally stacked materials positioned to enable the arms to bend in-plane when heated. Conductors are positioned within the actuator for heating the arms. Because of the rules governing abstracts, this abstract should not be used to construe the claims.
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