Invention Grant
- Patent Title: Thin film type varistor and a method of manufacturing the same
- Patent Title (中): 薄膜型压敏电阻及其制造方法
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Application No.: US12740624Application Date: 2008-08-20
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Publication No.: US08242875B2Publication Date: 2012-08-14
- Inventor: Jung Wook Lim , Jun Kwan Kim , Sun Jin Yun , Hyun Tak Kim
- Applicant: Jung Wook Lim , Jun Kwan Kim , Sun Jin Yun , Hyun Tak Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2007-0110152 20071031; KR10-2008-0023827 20080314
- International Application: PCT/KR2008/004853 WO 20080820
- International Announcement: WO2009/057885 WO 20090507
- Main IPC: H01C7/10
- IPC: H01C7/10

Abstract:
A thin film type varistor and a method of manufacturing the same are provided. The method includes: a depositing a first zinc oxide thin film at a low temperature through a sputtering method; and a forming a zinc oxide thin film for a varistor by treating the first zinc oxide thin film with heat at a low temperature in an environment in which an inert gas and oxygen are injected. Accordingly, it is possible to lower a processing temperature and simplify a manufacturing process while maintaining a varistor characteristic so as to be applied to a highly integrated circuit.
Public/Granted literature
- US20100259357A1 THIN FILM TYPE VARISTOR AND A METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-10-14
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