Invention Grant
- Patent Title: Ion implanter for photovoltaic cell fabrication
- Patent Title (中): 用于光伏电池制造的离子注入机
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Application No.: US12824426Application Date: 2010-06-28
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Publication No.: US08242468B2Publication Date: 2012-08-14
- Inventor: Thomas Parrill , Aditya Agarwal
- Applicant: Thomas Parrill , Aditya Agarwal
- Applicant Address: US CA San Jose
- Assignee: Twin Creeks Technologies, Inc.
- Current Assignee: Twin Creeks Technologies, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Cesari and McKenna, LLP
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/30
Abstract:
Ion implanters are especially suited to meet process dose and energy demands associated with fabricating photovoltaic devices by ion implantation followed by cleaving.
Public/Granted literature
- US20100264303A1 ION IMPLANTER FOR PHOTOVOLTAIC CELL FABRICATION Public/Granted day:2010-10-21
Information query
