Invention Grant
- Patent Title: Film wrapped NFET nanowire
- Patent Title (中): 膜包裹NFET纳米线
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Application No.: US13184004Application Date: 2011-07-15
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Publication No.: US08232165B2Publication Date: 2012-07-31
- Inventor: Dureseti Chidambarrao , Lidija Sekaric
- Applicant: Dureseti Chidambarrao , Lidija Sekaric
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor structure includes an n-channel field effect transistor (NFET) nanowire, the NFET nanowire comprising a film wrapping around a core of the NFET nanowire, the film wrapping configured to provide tensile stress in the NFET nanowire. A method of making a semiconductor structure includes growing a film wrapping around a core of an n-channel field effect transistor (NFET) nanowire of the semiconductor structure, the film wrapping being configured to provide tensile stress in the NFET nanowire.
Public/Granted literature
- US20110275198A1 FILM WRAPPED NFET NANOWIRE Public/Granted day:2011-11-10
Information query
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