发明授权
US08229064B2 Localization of an element of interest by XRF analysis of different inspection volumes 有权
通过XRF对不同检验量的分析来定位感兴趣的元素

Localization of an element of interest by XRF analysis of different inspection volumes
摘要:
An apparatus and method are disclosed for localizing an element of interest in a sample by comparing XRF spectra acquired from at least two distinct but overlapping inspection volumes. The inspection volumes are varied by changing the geometry of the exciting x-ray and/or fluoresced x-ray beam(s), which may be accomplished by repositioning multi-apertured collimators. Comparison of the XRF spectra acquired from different inspection volumes provides an indication as to whether the element of interest (e.g., lead) is present in a coating layer, in the underlying bulk material, or in both.
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