Invention Grant
US08198664B2 Semiconductor memory device having cylinder-type capacitor lower electrode and associated methods 有权
具有圆柱型电容器下电极的半导体存储器件及相关方法

  • Patent Title: Semiconductor memory device having cylinder-type capacitor lower electrode and associated methods
  • Patent Title (中): 具有圆柱型电容器下电极的半导体存储器件及相关方法
  • Application No.: US12588791
    Application Date: 2009-10-28
  • Publication No.: US08198664B2
    Publication Date: 2012-06-12
  • Inventor: Gil-sub Kim
  • Applicant: Gil-sub Kim
  • Applicant Address: KR Suwon-si, Gyeonggi-do
  • Assignee: Samsung Electronics Co., Ltd.
  • Current Assignee: Samsung Electronics Co., Ltd.
  • Current Assignee Address: KR Suwon-si, Gyeonggi-do
  • Agency: Lee & Morse, P.C.
  • Priority: KR10-2009-0011500 20090212
  • Main IPC: H01L27/108
  • IPC: H01L27/108
Semiconductor memory device having cylinder-type capacitor lower electrode and associated methods
Abstract:
A semiconductor memory device including a plurality of supports extending parallel to each other in a first direction on a semiconductor substrate, and capacitor lower electrode rows including a plurality of capacitor lower electrodes arranged in a line along the first direction between two adjacent supports from among the plurality of supports, each capacitor lower electrode including outside walls, wherein each of the capacitor lower electrodes includes two support contact surfaces on the outside walls of the capacitor lower electrode, the support contact surfaces respectively contacting the two adjacent supports from among the plurality of supports.
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