发明授权
US08183691B2 Semiconductor device with pads overlapping wiring layers including dummy wiring 有权
具有焊盘重叠布线层的半导体器件包括虚拟布线

Semiconductor device with pads overlapping wiring layers including dummy wiring
摘要:
A semiconductor device includes plural electrode pads arranged in an active region of a semiconductor chip, and wiring layers provided below the plural electrode pads wherein occupation rates of wirings arranged within the regions of the electrode pads are, respectively, made uniform for every wiring layer. To this end, in a region where an occupation rate of wiring is smaller than those in other regions, a dummy wiring is provided. On the contrary, when the occupation rate of wiring is larger than in other regions, slits are formed in the wiring to control the wiring occupation rate. In the respective wirings layers, the shapes, sizes and intervals of wirings below the respective electrode pads are made similar or equal to one another.
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