发明授权
US08183691B2 Semiconductor device with pads overlapping wiring layers including dummy wiring
有权
具有焊盘重叠布线层的半导体器件包括虚拟布线
- 专利标题: Semiconductor device with pads overlapping wiring layers including dummy wiring
- 专利标题(中): 具有焊盘重叠布线层的半导体器件包括虚拟布线
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申请号: US12817557申请日: 2010-06-17
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公开(公告)号: US08183691B2公开(公告)日: 2012-05-22
- 发明人: Taku Kanaoka , Masashi Sahara , Yoshio Fukayama , Yutaro Ebata , Kazuhisa Higuchi , Koji Fujishima
- 申请人: Taku Kanaoka , Masashi Sahara , Yoshio Fukayama , Yutaro Ebata , Kazuhisa Higuchi , Koji Fujishima
- 申请人地址: JP Kawasaki-shi JP Tokyo
- 专利权人: Renesas Electronics Corporation,Hitachi ULSI System Co., Ltd.
- 当前专利权人: Renesas Electronics Corporation,Hitachi ULSI System Co., Ltd.
- 当前专利权人地址: JP Kawasaki-shi JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2002-250537 20020829
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A semiconductor device includes plural electrode pads arranged in an active region of a semiconductor chip, and wiring layers provided below the plural electrode pads wherein occupation rates of wirings arranged within the regions of the electrode pads are, respectively, made uniform for every wiring layer. To this end, in a region where an occupation rate of wiring is smaller than those in other regions, a dummy wiring is provided. On the contrary, when the occupation rate of wiring is larger than in other regions, slits are formed in the wiring to control the wiring occupation rate. In the respective wirings layers, the shapes, sizes and intervals of wirings below the respective electrode pads are made similar or equal to one another.
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