发明授权
- 专利标题: Package-type piezoelectric resonator and method of manufacturing package-type piezoelectric resonator
- 专利标题(中): 封装型压电谐振器及制造封装型压电谐振器的方法
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申请号: US12449533申请日: 2008-02-19
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公开(公告)号: US08179023B2公开(公告)日: 2012-05-15
- 发明人: Takehiro Takahashi
- 申请人: Takehiro Takahashi
- 申请人地址: JP Tokyo
- 专利权人: Nihon Dempa Kogyo, Co., Ltd.
- 当前专利权人: Nihon Dempa Kogyo, Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Jordan and Hamburg LLP
- 优先权: JP2007-039760 20070220
- 国际申请: PCT/JP2008/053126 WO 20080219
- 国际公布: WO2008/102900 WO 20080828
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
Provided is a package-type piezoelectric sensor which can be packaged at a wafer stage and which is suitable for mass production. A package-type quartz resonator has lead electrodes that are interposed in a close contact state, between on one side stepped surfaces, and on another side a lower surface of a frame portion of a piezoelectric substrate. The close contact state is maintained when a base is joined to a lower surface side of the piezoelectric substrate. By joining a cover to an upper surface side of the piezoelectric substrate and joining the base to the lower surface side of the piezoelectric substrate, the piezoelectric substrate may be easily sealed to be airtight. In particular, a space in a recessed portion of the base is sealed airtight. This enables avoidance of complications in the manufacturing process.
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