发明授权
US08174660B2 Metal line, method of forming the same, and a display using the same
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金属线,其形成方法和使用其的显示器
- 专利标题: Metal line, method of forming the same, and a display using the same
- 专利标题(中): 金属线,其形成方法和使用其的显示器
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申请号: US12332249申请日: 2008-12-10
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公开(公告)号: US08174660B2公开(公告)日: 2012-05-08
- 发明人: Sung Ryul Kim , Yong-Mo Choi , Sung-Hoon Yang , Hwa-Yeul Oh , Kap-Soo Yoon , Jae-Ho Choi , Seong-Hun Kim
- 申请人: Sung Ryul Kim , Yong-Mo Choi , Sung-Hoon Yang , Hwa-Yeul Oh , Kap-Soo Yoon , Jae-Ho Choi , Seong-Hun Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Innovation Counsel LLP
- 优先权: KR10-2008-0006698 20080122
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343
摘要:
Provided are a metal line, a method of forming the same, and a display using the same. To increase resistance of a metal line having a multilayered structure of CuO/Cu and prevent blister formation, a plasma treatment is performed using a nitrogen-containing gas and a silicon-containing gas or using a hydrogen or argon as and the silicon-containing gas. Accordingly, a plasma treatment layer such as a SiNx or Si layer is thinly formed on the copper layer, thereby preventing an increase in resistance of the copper layer and also preventing blister formation caused by the damage of a copper oxide layer. Consequently, it is possible to improve the reliability of a copper line and thus enhance the reliability of a device.
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