Invention Grant
- Patent Title: Semiconductor element, method for manufacturing same, and electronic device including same
- Patent Title (中): 半导体元件及其制造方法及包括其的电子器件
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Application No.: US12530552Application Date: 2008-04-01
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Publication No.: US08173487B2Publication Date: 2012-05-08
- Inventor: Masao Urayama , Masashi Kawasaki , Hideo Ohno
- Applicant: Masao Urayama , Masashi Kawasaki , Hideo Ohno
- Applicant Address: JP Osaka-Shi, Osaka JP Sendai-Shi, Miyagi
- Assignee: Sharp Kabushiki Kaisha,Tohoku University
- Current Assignee: Sharp Kabushiki Kaisha,Tohoku University
- Current Assignee Address: JP Osaka-Shi, Osaka JP Sendai-Shi, Miyagi
- Agency: Nixon & Vanderhye P.C.
- Priority: JP2007-101133 20070406
- International Application: PCT/JP2008/056501 WO 20080401
- International Announcement: WO2008/126729 WO 20081023
- Main IPC: H01L29/12
- IPC: H01L29/12 ; H01L21/20

Abstract:
A thin-film transistor (1) of the present invention includes an insulating substrate (2), a gate electrode (3) which has a predetermined shape and is formed on the insulating substrate (2), a gate insulating film (4) formed on the gate electrode (3), and a semiconductor layer (5) which is polycrystalline ZnO and is formed on the gate insulating film (4). The semiconductor layer (5) is immersed in a solution in which impurities are dissolved so that the impurities are selectively added to a grain boundary part of the polycrystalline ZnO film. Subsequently, a source electrode (6) and a drain electrode (7) are formed so as to have a predetermined shape. Next, a protection layer (8) is formed on the source electrode (6) and the drain electrode (7). Thus, a thin-film transistor which has a good subthreshold characteristic and has a zinc oxide film as a base of an active layer can be realized.
Public/Granted literature
- US20100044702A1 SEMICONDUCTOR ELEMENT, METHOD FOR MANUFACTURING SAME, AND ELECTRONIC DEVICE INCLUDING SAME Public/Granted day:2010-02-25
Information query
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