发明授权
- 专利标题: Integrated circuit structure incorporating an inductor, an associated design method and an associated design system
- 专利标题(中): 结合电感的集成电路结构,相关设计方法和相关设计系统
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申请号: US12720728申请日: 2010-03-10
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公开(公告)号: US08171435B2公开(公告)日: 2012-05-01
- 发明人: Zhong-Xiang He , Robert M. Rassel , Steven H. Voldman
- 申请人: Zhong-Xiang He , Robert M. Rassel , Steven H. Voldman
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Gibb I.P. Law Firm, LLC
- 代理商 Anthony J. Canale
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; G06F11/22
摘要:
Disclosed are embodiments of a circuit (e.g., an electrostatic discharge (ESD) circuit), a design methodology and a design system. In the circuit, an ESD device is wired to a first metal level (e.g., M1). An inductor is formed in a second metal level (e.g., M5) above the first metal level and is aligned over and electrically connected in parallel to the ESD device by a single vertical via stack. The inductor is configured to nullify, for a given application frequency, the capacitance value of the ESD device. The quality factor of the inductor is optimized by providing, on a third metal level (e.g., M3) between the second metal level and the first metal level, a shield to minimize inductive coupling. An opening in the shield allows the via stack to pass through, trading off Q factor reduction for size-scaling and ESD robustness improvements.
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