Invention Grant
US08169613B1 Segmented polarizer for optimizing performance of a surface inspection system 有权
分段偏振器,用于优化表面检测系统的性能

Segmented polarizer for optimizing performance of a surface inspection system
Abstract:
A polarizing device may be used with sample inspection system having one or more collection systems that receive scattered radiation from a region on a sample surface and direct it to a detector. The polarizing device disposed between the collection system(s) and the detector. The polarizing device may include a plurality of polarizing sections. The sections may be characterized by different polarization characteristics. The polarizing device is configured to transmit scattered radiation from defects to the detector and to block noise from background sources that do not share characteristics with scattered radiation from the defects from reaching the detector while, maximizing a capture rate for the defects the detector at a less than optimal signal-to-noise ratio.
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