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US08168130B2 Plasma generation system and plasma generation method 有权
等离子体发生系统和等离子体生成方法

Plasma generation system and plasma generation method
摘要:
A method and system for surely and conveniently generating plasma in a narrow tube having a small diameter.A first electrode formed by a conductive member covered with an insulator or dielectric is inserted into a narrow tube. The narrow tube is located on a second electrode. A power supply applies an alternating voltage or pulse voltage between the first electrode and the second electrode so that plasma is generated in the narrow tube around the first electrode.
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